vacuum pumping

基本解释

At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
The results show that the vacuum pumping rate is increased and the void ratio is decreased obviously using solder sheet and plasma cleaning technology.
研究结果表明，使用等离子清洗的焊片可显著提高抽真空速率，并减少气泡，降低空洞率；
The use of our company with independent intellectual property rights "open continuous vacuum pumping Filter" patent technology (patent No. ZL 97 2 49817.6).
我公司运用拥有自主知识产权的“开放式连续型真空抽滤池”专利技术（专利号为ZL 97 2 49817.6）。